| 摘要 |
PROBLEM TO BE SOLVED: To provide a form-variable mirror suitable to be small-sized by integrating a controlling circuit on a substrate where a counter electrode is formed. SOLUTION: In one embodiment of the invention, the form-variable mirror has a flexible thin film which has a reflection face and an upper electrode and which can deform by electrostatic attractive force, a frame member which supports the flexible thin film, a controlling electrode disposed facing the upper electrode, and a substrate where the controlling electrode is formed. At least either the frame member or the substrate is a semiconductor substrate. At least a part of the voltage controlling circuit which controls the voltage applied between the electrodes is formed on the semiconductor substrate. |
