| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a power feeding method for substrate transfer containers whereby there is made possible a highly reliable power feeding in a substrate transfer container whereon a rechargeable secondary battery, an air-cleaner operated by the secondary battery, and the like are mounted or whereon the rechargeable secondary battery, an air-cleaner operated by an external power supply, and the like are mounted. SOLUTION: In a power feeder apparatus for substrate transfer containers having rechargeable batteries, there are provided a power feeder apparatus main body 15 for seating therein a substrate transfer container 10, a seating sensing means 18 provided in the power-feeding-apparatus main body 15 and for sensing the seating of the substrate carrying container 10, a power feeding connector 19 provided movably in the power-feeding-apparatus main body 15, and a controlling mechanism 20 for contacting according to the sensed signal by the seating sensing means 18 the power feeding connector 19 with the charging terminal through which the battery of the substrate container 10 is charged.</p> |
