发明名称 |
Optomechanical radiant energy detector |
摘要 |
A MicroOptoElectroMechanical (MOEM) IR detector utilizes a novel combination of integrated MEMS and photonics to achieve high responsivity with low noise. Increasing incident radiant energy bends a bimaterial arm that moves a coupling waveguide into the evanescent field of a principal optical waveguide. This, in turn, modulates the light in the principal waveguide. This device has high detection sensitivity to incident radiation due to the combination of the length of the lever arm and the sensitivity of the evanescent field. The device exhibits low noise because photons are being modulated instead of electrons.
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申请公布号 |
US6392233(B1) |
申请公布日期 |
2002.05.21 |
申请号 |
US20000635552 |
申请日期 |
2000.08.10 |
申请人 |
SARNOFF CORPORATION |
发明人 |
CHANNIN DONALD JONES;PANTUSO FRANCIS PAUL;AMANTEA ROBERT;MICHAEL ROBERT RAYMOND |
分类号 |
G01J5/40;(IPC1-7):G01J5/34 |
主分类号 |
G01J5/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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