Optical article, exposure apparatus or optical system using it, and process for producing it

摘要

An exposure apparatus having an illumination light source and a stage for an exposed object to be mounted thereon, in which at least one of an illumination optical system and a projection optical system includes a plurality of optical articles in each of which a first optically transparent thin layer and a second optically transparent thin layer having a higher refractive index than that of the first optically transparent thin layer are laminated on a surface of a substrate. At least one of the first and second optically transparent thin layers includes a layer of oxides or fluorides and atoms of at least one selected from the group consisting of krypton, xenon and radon, in which the content of the atoms is within a range of from 0.5 atomic ppm to 1 atomic %, inclusive.