METHOD FOR PRODUCING SILANE FROM TRIALKOXYSILANE AND METHOD FOR PRODUCING TRIALKOXYSILANE FROM TETRAALKOXYSILANE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a silane from a trialkoxysilane by the vapor-phase reaction in high reaction result at a low cost by converting a tetraalkoxysilane into the trialkoxysilane and enabling the use of the product as a raw material for the production of silane and provide a method for producing a trialkoxysilane from a tetraalkoxysilane. SOLUTION: A vapor-phase reaction of silicon with an alcohol is carried out in the 1st reaction step to produce a trialkoxysilane, the trialkoxysilane is subjected to disproportionation reaction in the 2nd reaction step to form a silane, the tetraalkoxysilane formed as a by-product in the formation of silane is converted into the trialkoxysilane in the 3rd reaction step and the obtained trialkoxysilane is recycled as a raw material of the 2nd reaction step. As an alternative, the tetraalkoxysilane is made to react with silicon and hydrogen to form the trialkoxysilane.