发明名称 |
METHOD FOR DEPOSITING INDIUM ZINC OXIDE FILM AND INDIUM TIN OXIDE FILM PATTERNED BY MICRO-CONTACT PRINTING |
摘要 |
PROBLEM TO BE SOLVED: To provide a depositing method of a self-aggregate single molecule layer on a metal oxide using the micro-contact printing in the patterning substantially of the derivative and the surface, and a derivative substance manufactured thereby. SOLUTION: In the method for depositing a patterned film of IZO or ITO by the micro-contact printing and etching, a stamp is brought into contact with a surface of the IZO or ITO film to transfer the self-aggregate single molecule layer of the molecular kind of a fist pattern. The self-aggregate single molecule layer is continuous to an exposed portion of the IZO or ITO film surface of a second pattern. The IZO or ITO film chemically reacts with IZO or ITO. The self-aggregate single molecule layer is removed from a lower substrate following the second pattern by bringing the inert etchant into contact with the exposed portion of the IZO or ITO film.
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申请公布号 |
JP2002060979(A) |
申请公布日期 |
2002.02.28 |
申请号 |
JP20010117072 |
申请日期 |
2001.04.16 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
TORISHIA L BREEN;PETA FRYER;RONALD WAYNE NUNES;MARY ELIZABETH ROTHWELL |
分类号 |
B41K3/00;C01G15/00;C01G19/00;C23C30/00;G02F1/1333;G03F7/00;G03F7/16;(IPC1-7):C23C30/00;G02F1/133 |
主分类号 |
B41K3/00 |
代理机构 |
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代理人 |
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