| 摘要 |
<p>PURPOSE: To provide equipment, where reduction of the equipment as a whole, shortening of lead time to manufacturing, reduction of cost, simplification of maintenance or the like may be performed, reliability by securing a definite sealing may be enhanced and convenience may be also enhanced, and moreover so that it will not be subjected to limitation attributable to different types of gas controller to be used. CONSTITUTION: Plural intermediate channel blocks 11 and a terminal channel block 12 are disposed on a concave 36 of a pedestal 10 for mounting devices 13, 14 are mounted on protrusions on both sides 35 of the pedestal 10. By using the mounting devices 13, 14, in the condition of positioning where first gas channels the 17, 31 and second 18, 32 in plural kinds of gas controllers 2 to 9 are communicated with the gas channels 40, 47 of the channel blocks 11, 12 via a metal gasket, the gas controllers 2 to 9 are connected with the channel blocks 11, 12, by pressing the controllers to sides of the blocks.</p> |
