GAS INJECTOR FOR SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PURPOSE: To provide a gas injector for semiconductor manufacturing device the process gas injecting extent of which can be limited correspondingly to the diameters of a plurality of wafers. CONSTITUTION: The process gas injecting extent of this gas injector is limited to a prescribed extent by sealing an injection port 213 from which the injection of a process gas is to be stopped with an injection limiting member 215. In addition, the process gas injecting extent is changed correspondingly to the diameters of the wafers by changing the size of the member 215 which is detachably attached to an injecting section 20.