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发明名称
VERFAHREN ZUM BESCHICHTEN VON SUBSTRATEN
摘要
申请公布号
AT209262(T)
申请公布日期
2001.12.15
申请号
AT19950911413T
申请日期
1995.03.17
申请人
发明人
WHITE, NORMAN, HENRY;WAUGH, ALLEN, ROBERTSON;SPENCER, ALARIC, GRAHAM;WALLS, JOHN, MICHAEL
分类号
C23C14/00;C23C14/08;C23C14/35;C23C14/50;C23C14/56;C23C14/58;(IPC1-7):C23C14/56
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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