发明名称 |
ELECTROLYTIC GRINDING METHOD IN PREPARATION OF SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPE AND APPARATUS UTILIZING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To prevent the formation of deposits on the surface of a sample. SOLUTION: In an electrolytic grinding apparatus equipped with a sample 2 for a transmission electron microscope, the electrodes 3 opposed to the sample 2, a grinding fluid supply means 5 for supplying a grinding fluid 4 to the gaps between the sample 2 and the electrodes 3, an applying means 6 for applying voltage across the sample 2 and the electrodes 3 to grind the sample 2 and a detection means 7 for detecting that the sample 2 becomes predetermined thickness by grinding to stop the grinding fluid supply means 5 and the applying means 6, a bias voltage applying means 8 for applying bias voltage across the sample 2 and the electrodes 3 immediately after the detection means 7 detects that the sample 2 becomes predetermined thickness and a washing liquid supply means 10 for supplying a cleaning fluid 9 to the sample 2 immediately after detection to wash the same are provided.
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申请公布号 |
JP2001337012(A) |
申请公布日期 |
2001.12.07 |
申请号 |
JP20000158998 |
申请日期 |
2000.05.29 |
申请人 |
CENTRAL RES INST OF ELECTRIC POWER IND |
发明人 |
DOI KENJI;SONETA NAOKI;ISHINO SHIORI |
分类号 |
G01N1/34;C25F3/16;G01N1/28;G01N1/32;(IPC1-7):G01N1/34 |
主分类号 |
G01N1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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