PEELING APPARATUS FOR ETCHED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a peeling apparatus for an etched substrate having a defoaming action. SOLUTION: The showers 3 for spraying a peeling liquid on a substrate 1 are provided inside a peeling tank 12 through which the etched substrates 1 are passed, and a defoaming mat 4 is laid on the bottom of the peeling tank.