Charged particle beam apparatus and method for operating the same

摘要

A method of irradiation with a charged particle beam and an irradiation apparatus wherein the charged particle beam supplied from an accelerator and extracted from the irradiation apparatus. The irradiation apparatus includes an electromagnet for scanning with the charged particle beam. The method includes the steps of stopping the extraction of the charged particle beam from the irradiation apparatus, changing an irradiation point of the charged particle beam by controlling the electromagnet under a condition when the extraction is stopped, and resuming the extraction of the charged particle beam from the irradiation apparatus after changing the irradiation point.