| 摘要 |
A microscopic optical system which is used in an ultraviolet range of short wavelengths and has good off-axis performance, such as chromatic aberration of magnification. The optical system has an objective optical system for forming an intermediate image of a specimen and a relay optical system for imaging the intermediate image again. The relay optical system has a first lens group and a second lens group, and at least one convex lens of at lease one of the first and second lens groups is formed from quartz.
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