MICROELECTROMECHANICAL DEVICES HAVING BRAKE ASSEMBLIES THEREIN TO CONTROL MOVEMENT OF OPTICAL SHUTTERS AND OTHER MOVABLE ELEMENTS

摘要

Microelectromechanical devices may include a substrate having first and seco nd optical fibers thereon. An optical shutter may also be provided. This optical shutte r is mechanically coupled to a first plurality of arched beams that are supported at opposing ends by support structures which may be mounted on the substrate. A second plurality of arch ed beams are also provided on a first side of the optical shutter. These arched beams are also supported at opposing ends by support structures. A first brake member is provided that i s coupled to the second plurality of arched beams. This first brake member contacts and restricts the optical shutter from moving in the ~y-direction when the second plurality of arched beams are relaxed, but releases the optical shutter when the second plurality of arche d beams move in the -x direction. This ability to restrict movement of the optical shutter when the second plurality of arched beams are relaxed provides a degree of nonvolatile position retention. A third plurality of arched beams are also preferably provided on a second sid e of the optical shutter. A second brake member, which is coupled to the third plurality of arched beams, also contacts and restricts the shutter member from moving in the ~y directi on when the third plurality of arched beams are relaxed, but releases the optical shutter when the third plurality of arched beams move in the +x direction.