发明名称 |
Method of manufacturing organic thin-film EL device |
摘要 |
In a method of manufacturing an organic thin-film electroluminescent device, a plurality of thin-film luminescent portions are arranged with fine pitches on a substrate. Each of the luminescent portions is formed by organic electroluminescent material or electrode material. A mask pattern is arranged on a pattern mask moving stage which finely moves in a predetermined direction. The substrate is arranged on a substrate moving stage. The substrate is opposed against the pattern mask with a predetermined pitch. An initial positioning alignment between the substrate and the pattern mask is performed by adjusting the substrate moving stage. The luminescent material is vaporized onto a surface of the substrate through the pattern mask. The luminescent material is vaporized on the surface of the substrate after moving the pattern mask onto a non-vaporizing portion of the surface of the substrate.
|
申请公布号 |
US6294892(B1) |
申请公布日期 |
2001.09.25 |
申请号 |
US19990470513 |
申请日期 |
1999.12.22 |
申请人 |
NEC CORPORATION |
发明人 |
UTSUGI KOJI;SAITOH TAKESHI;TAMEGAI MASASHI |
分类号 |
H01L21/203;C23C14/04;H01L51/50;H05B33/00;H05B33/10;H05B33/12;(IPC1-7):H05B33/10 |
主分类号 |
H01L21/203 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|