Production of components of a drop generator comprises etching peripheral slits in a first wafer to form frame plates, etching nozzles having pre-chambers in a second wafer

摘要

Production of components of a drop generator comprises: (i) etching peripheral slits in a first wafer to form frame plates (5) on three sides and an open liquid longitudinal channel on one side surface; (ii) etching nozzles (3) having pre-chambers (3c) in a second wafer; (iii) connecting the wafers by bonding to the side surfaces; and (iv) cutting out a number of bending converters from the bonded wafers as base plate.