| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card allowing always accurate measurement and overhaul and causing no deterioration in wiring efficiency of an intermediate layer or bad influence on the strength of a substrate even if a laminated substrate is used as the substrate. SOLUTION: This probe card is provided with a substrate 110, a spacer 120 attached to the back face side of the substrate 110, a reinforcing member 130 attached to the surface side of the substrate 110, a probe fixing member 140 attached to the spacer 120, a plurality of probes 150 connected to a wiring pattern formed on the substrate 110 and fixed to the probe fixing member 140, and a first mounting screw 160 used for mounting the spacer 120 to the substrate 110. In this probe card, at least clearances between the substrate 110 and the reinforcing member 130 and between the base board 110 and the spacer 120 are not fixed with an adhesive.
|
