| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear arrangement of a diffraction grating device which has a large active area whose diffraction direction lies at right angles to the arrangement direction, can diffract light to a discrete order efficiently at high speed, and fits the CMOS production process. SOLUTION: A mechanical type diffraction grating device for modulating incident light by diffraction has a long element including a light reflective surface, a pair of end supporting bodies for supporting the slender element at both ends of a substrate, at least, one intermediate part supporting body between a pair of end supporting bodies, and a means for applying power to the slender element in order to deform it between a first operating state and second operating state.
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