发明名称 METHOD FOR MANUFACTURING OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device by which ion implantation is ensured even when ions are implanted into the side surface of a bipolar transistor arranged in the different direction. SOLUTION: A surface of a base emitter formation side wall a705 of an NPN bipolar transistor a701 is not made parallel to a side wall surface of a collector electrode formation side wall a706 on the opposite side of the NPN bipolar transistor a701, and a distance between the side walls a705 and a706 is made smaller gradually toward a direction for arranging the emitter, base, and collector.
申请公布号 JP2001203212(A) 申请公布日期 2001.07.27
申请号 JP20000009011 申请日期 2000.01.18
申请人 OKI ELECTRIC IND CO LTD 发明人 IWAYA MINORU
分类号 H01L29/73;H01L21/06;H01L21/265;H01L21/266;H01L21/331;H01L21/822;H01L21/8228;H01L27/06;H01L27/082;H01L29/74;(IPC1-7):H01L21/331 主分类号 H01L29/73
代理机构 代理人
主权项
地址