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发明名称
MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT
摘要
申请公布号
EP1088376(A4)
申请公布日期
2001.07.11
申请号
EP19990947055
申请日期
1999.02.25
申请人
CYMER, INC.
发明人
NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.
分类号
H01S3/097;H01S3/038;H02M3/00;H02M3/157;H03K3/45;H03K5/13;(IPC1-7):H03K3/53
主分类号
H01S3/097
代理机构
代理人
主权项
地址
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