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发明名称
SEMICONDUCTOR MEMORY
摘要
申请公布号
EP1079394(A4)
申请公布日期
2001.07.11
申请号
EP19990913705
申请日期
1999.04.19
申请人
KABUSHIKI KAISHA ULTRACLEAN TECHNOLOGY RESEARCH INSTITUTE;OHMI, TADAHIRO;SHIBATA, TADASHI
发明人
OHMI, TADAHIRO;SHIBATA, TADASHI;WEE, KENG HOONG;YONEZAWA, TAKEMI;NOZAWA, TOSHIYUKI;NITTA, TAKAHISA
分类号
G11C16/02;G11C11/56;G11C27/00;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C27/00
主分类号
G11C16/02
代理机构
代理人
主权项
地址
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