| 摘要 |
measurement technology. SUBSTANCE: invention is related to equipment measuring loaded Q-factor of superhigh frequency resonator used to determine parameters of materials by radio wave resonance method, for instance, dissipation factor of dielectric substrates of integrated circuits. Proposed gear includes wattmeter and generator, directional coupler, ferrite valve, resonator, first matched load connected in series. It is inserted with second matched load and two plates, mobile and immobile, superimposed one on another with holes equal to section of waveguide across output of resonator. Output of resonator is connected to first hole of immobile plate and side channel of directional coupler is connected to second hole of same plate. Wattmeter is connected to central hole of three holes in mobile plate and first and second matched loads are connected to two other holes. Distances between holes in both plates are equal. Mobile plate can take two fixed positions in which holes in both plates match. EFFECT: increased measurement accuracy of loaded Q- factor of resonator while determining parameters of materials by resonance method. 5 dwg
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