OPTICAL WAVEGUIDE ELEMENT AND METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide element which is capable of forming good waveguide end faces while suppressing the occurrence of chipping when forming the end faces at an SrTiO3 substrate formed with the thin-film optical waveguide and to provide the optical waveguide element which is the optical waveguide element formed the thin-film optical waveguide on the SrTiO3 substrate and has the good optical waveguide end faces and may be manufactured at a good yield. SOLUTION: The end faces of the optical waveguide are formed by grinding the SrTiO3 substrate formed with the thin-film optical waveguide in such a manner that the chipping occurrence rate of the ground surfaces attains <=10%.