| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for mounting chips, whose installation space is small. SOLUTION: A movable table 21 is provided above conveyors for substrate transportation 6b. Pallets 25 in magazines 35 at both side parts of the movable table 21 are pulled out on the movable table 21 by means of pawls 37. The movable table 21 moves the palettes 25 on which trays 26 are placed to a pickup stage A. A loading head loads the chips on the trays 26 on the pickup stage A on a substrate. When the chips on the trays 26 run out, the trays 26 are moved beneath the pickup head 31. Then, the trays are vacuum-clamped and are picked up by a suction pad 32. A collection unit 28 moves beneath the trays 26 and the trays 26 are dropped on the tray collection unit 28 so as to collect the trays 26. |
