| 摘要 |
PROBLEM TO BE SOLVED: To achieve background elimination method that accurately eliminates the part of background, and can detect accurate concentration distribution in a glow discharge emission spectrochemical analysis. SOLUTION: In the glow discharge emission spectrochemical analysis, a sample surface is subjected to sputtering by glow discharge, at the same time, the spectrum detection of atom light emission is made, and an element analysis is carried out. In this case, the measurement and background profiles of a sample are obtained (CS1 and S2), a correction coefficient for allowing the value of the background profile to correspond to a background value in the measurement profile is multiplied by the value of the background profile for obtaining the corrected background profile (S3), and the corrected background profile is subtracted from the measurement profile for eliminating background (S4).
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