发明名称 ROTARY COATING DEVICE AND ROTARY COATING METHOD
摘要 PROBLEM TO BE SOLVED: To allow a coating agent to be applied on the whole area of both surfaces of a work. SOLUTION: In this rotary coating device, a first transportation part 8 transports the work 16 from a first positioning part 4 to a first rotary cup part 10. At the first rotary cup part 10, coating processing on one surface 16a of the work 16 is executed. A second transportation part 25 transports the work 16 on which coating is finished to a reversing part 32. The reversing part 32 reverses the front and the back of the work 16 and mounts the work 16 on an intermediate transfer part 39. The intermediate transfer part 39 supplies the work 16 to a second positioning part 45. A third transportation part 50 transports the work 16 on the second positioning part 45 to a second rotary cup part 57. Coating processing on another surface of the work 16 is executed at the second rotary cup part 57. The work 16 both surfaces of which are coated is taken out by a fourth transportation part 72. In the rotary coating device 1, thus the coating agent is applied on the whole area of both surfaces of the work 16.
申请公布号 JP2001029866(A) 申请公布日期 2001.02.06
申请号 JP19990211115 申请日期 1999.07.26
申请人 SHARP CORP 发明人 KAMIYAMA AKINORI
分类号 B05D1/40;B05C9/04;B05C11/08;G03F7/16;H01L21/027 主分类号 B05D1/40
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