摘要 |
A vacuum pump includes a housing having an inlet port and an exhaust port, a motor disposed in the housing, and one or more vacuum pumping stages disposed in the housing and operationally coupled to the motor for pumping gas from the inlet port to the exhaust port. The motor includes a stator disposed on a central axis and a rotor disposed around the stator. The rotor rotates about the central axis when the motor is energized. The motor may be located at the center of the housing, and the vacuum pumping stages may be disposed around the motor in an annular configuration. The inverted motor configuration facilitates a compact vacuum pump structure.
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