| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspecting method that employs a masking processing capable of reducing, as far as possible, a dead zone that causes overlooking of flaws, while preventing a positioning error and excessive detection due to product diversity. SOLUTION: A mask image is produced on the basis of each inspection target object itself during actual flaw inspecting process. That is, an inspection target image A is binarized at S2, and is reduced by a predetermined amount at S3, so that the reduced binary image A is used as the mask image for the inspection target image A. Accordingly, it is possible to eliminate a dead zone that causes overlooking of flaws, and to determine an inspection region on the basis of the inspection target image itself that is the actual flaw inspection target so as to cause no problems of positioning error and excessive detection due to product diversity. |
