发明名称 PRECISELY VARIABLE RECTANGULAR DOUBLE BEAM OPTICAL SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To project efficiently a processing beam on a work, even when combining with each other a plurality of laser light sources, by joining spatially to each other a pair of projective beams to synthesize them, by dividing once the synthesized synthetic beam into a plurality of divided beams, and further, by superimposing on each other the divided synthetic beams to project them on the work. SOLUTION: A projective optical system 40 projects on a work W with a predetermined illuminance a synthetic beam CL synthesized by a synthetic optical system 30. The synthetic optical system 30 joins spatially to each other a pair of laser beams LB1, LB2 emitted from both laser light sources 21, 22 to form the synthetic beam CL, and it comprises a pair of knife-edge mirrors 31, 32 provided in parallel with each other. A homogenizer 41 of the projective optical system 40 divides once into a plurality of divided beams the synthetic beam CL outputted from the synthetic optical system 30, and makes rectangular the sections of the divided beams to superimpose the divided beams on each other and project them uniformly on a predetermined surface. A lens optical system 42 of the projective optical system 40 forms into the beam of a predetermined shape the uniform beam outputted from the homogenizer 41.</p>
申请公布号 JP2001023919(A) 申请公布日期 2001.01.26
申请号 JP19990194784 申请日期 1999.07.08
申请人 SUMITOMO HEAVY IND LTD 发明人 YAMAZAKI KAZUNORI
分类号 B23K26/06;B23K26/067;G02B27/09;H01L21/20;H01L21/268;(IPC1-7):H01L21/268 主分类号 B23K26/06
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