NANOMETER-ORDER MECHANICAL VIBRATOR, PRODUCTION METHOD THEREOF AND MEASURING DEVICE USING IT

摘要

A stable and high-sensitivity nanometer-order mechanical vibrator having a detection resolution for nanometer-order jumpy force and mass change, a production method therefor, and a measuring device using it. The nanometer-order mechanical vibrator (10) comprises a base (11), a tetrahedron-shape vibrator mass (13), a neck portion (12) connecting the base (11) and the vibrator mass (13) together and having an elastic element. The vibrator (10) is of a nanometer-order mushroom shape. The vibrator mass (13) in a tetrahedron shape is suitable for a probe of a scanning type microscope for observing the surface conditions of an arbitrary sample by bringing the mass (13) as a probe close to the sample surface.