| 摘要 |
PROBLEM TO BE SOLVED: To reduce measurement errors by coupling a slider to a carrier in such a way that dynamic vectors do not occur except a vector directed in the travelling direction of the slider, preventing return errors, and improving repeat accuracy. SOLUTION: A first bearing part 15 with a spherical end part 15a opposite to a slider 7 is provided for a carrier 8, and a second bearing part 16 with an approximately conical recessed part 16a to receive the spherical surface 15a of the first bearing part 15 is arranged in the slider 7. The carrier 8 and slider 7 are fastened to the slider 7 at one point in a straight line which intersects the center of the spherical surface 15a and is in parallel with the traveling direction of the slider 7, and the spherical surface 15a is pressed against and coupled to the recessed part 16a by a coil spring 18 to provide the carrier 8 with a biasing force in the direction in prattle with the travelling direction of the slider 7.
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