| 摘要 |
PROBLEM TO BE SOLVED: To easily exchange a sample and to surely reproduce a focusing position obtained before the sample is exchanged. SOLUTION: A focusing device is provided with a column 10, a moving member 20, a movable member 30, a rack 40, a rotary shaft 50 and a pinion 51. The moving member 20 to which a stage 21 is fixed and the movable member 30 are pressed in a direction that they are energized in mutually separating direction by a compression coil spring 31 with which the movable member 30 is provided. Then, a rocking piece 22 is supported at the moving member 20 by a bolt 23 so that it can be rocked. The piece 22 is provided with a slidable pin 60 and the pin 60 is pressed to a cam groove 32 formed at the movable member 30. Then, a positioning means is constituted of the piece 22, a leaf spring 61, the pin 60 and the groove 32 and the vertical moving amount of the movable member 30 with respect to the moving member 20 is restricted by the groove 32.
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