Thermal ink jet printhead with increased heater resistor control

摘要

An improved method is disclosed for forming heater elements for an ink jet printhead. The resistance is more closely controlled by doping a central heater region which is formed relatively thinner than the heavily doped heater regions which are used as the gate and contact areas. The thinner central region can doped relatively heavy in order to more accurately adjust the heater resistance. In another embodiment, the thin layer is amorphous silicon rather than the polysilicon to increase the latitude of the energy input.