| 摘要 |
PROBLEM TO BE SOLVED: To easily set a manufacturing condition. SOLUTION: This manufacturing method includes a proton exchange process for forming a waveguide 13 on a masked substrate 10 by a proton exchanging method, and an annealing process for heat-treating the substrate 10 after the proton exchange process. A masking groove width W is set based on a ratio of a wavelengthλof used light to an optimal mode field radiusωzo. Then, a temperature Te and a time (te) of proton exchange and a temperature Ta and a time (ta) for annealing are set by an expression W=K(λ/ωzo)10 (0.0110Ta-0.0075Te)×(ta/te) (1/2), where K is a constant satisfying (1/80)<K<(1/50). |
