发明名称 |
Probe card with plural probe tips on a unitary flexible tongue |
摘要 |
A probe card comprises the following elements. An insulation film is provided which is flexible and extends on a first surface of a substrate. The insulation film has a first surface in contact with the first surface of the substrate, to form a space region which is defined between the first surface of the substrate and the first surface of the insulation film so as to allow part of the insulation film to move into the space. Probe patterns extend on a second surface of the insulation film so that the probe patterns.
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申请公布号 |
US6114864(A) |
申请公布日期 |
2000.09.05 |
申请号 |
US19970833221 |
申请日期 |
1997.04.14 |
申请人 |
NEC CORPORATION |
发明人 |
SOEJIMA, KOJI;SENBA, NAOJI |
分类号 |
G01R31/26;G01R1/06;G01R1/067;G01R1/073;G01R3/00;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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