| 摘要 |
<p>PROBLEM TO BE SOLVED: To move a substrate holding section safely even if a substrate transferring apparatus is put to an emergency stop by providing the substrate holding section, a driving section for displacing the substrate holding section vertically, and a biasing section for biasing the substrate holding section upward. SOLUTION: A substrate processing system has a substrate processing apparatus 2 and a substrate transferring apparatus 3. The apparatus 3 has a horizontally transferring robot, a posture changing mechanism 50, and a vertically moving travelling mechanism 60. The mechanism 50 has a table 51 on which a motor M1 is placed, and rotates a rotating table 53 by a driving force of the motor M1. A substrate guide 54 is provided on the table 53, and grooves formed in the guide 54 serve to support a substrate W. An air cylinder AS1 as a biasing section is fixed to the table 53. The mechanism 60 has a vertically moving table 63 which is vertically moved by a driving force of a motor M2. The mechanism 60 also has an air cylinder AS2 as the biasing section.</p> |
