摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave oscillator that can oscillate a high oscillating frequency without relying on minute electrodes. SOLUTION: Two interdigital electrode transducers 5, 6 are formed on a piezoelectric film 4. One transducer 5 is connected to an input side 8a of an amplifier 8, and an output side 8b of the amplifier 8 is connected to the other transducer 6 in the delay line type surface acoustic wave oscillator. The piezoelectric film 5 is formed on a high speed propagation body 3 whose surface acoustic wave propagation speed is faster than that of the piezoelectric film 4. More preferably, the piezoelectric film 4 is a ZnO film whose film thickness is 0.5-1.0μm.
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