| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive electrostatic actuator, and a manufacturing method thereof, in which high density can be realized. SOLUTION: A diaphragm substrate 1 and an electrode substrate 2 are bonded directly without using any adhesive and a silicon oxide 9 for forming a gap is provided on the diaphragm substrate 1 side. Alternatively, a silicon oxide of having a thickness becoming a gap is formed by thermal oxidation on a silicon wafer where impurities are implanted heavily to the diaphragm substrate 1 on the side being bonded to the electrode substrate 2 and then it is patterned into a desired shape before being bonded to the electrode substrate 2.
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