发明名称 METHOD FOR FORMING DRAM CAPACITOR AND CAPACITOR MADE THEREBY
摘要 PURPOSE: A method for forming a DRAM capacitor and capacitor made thereby is provided to reduce the DRAM size by formatting a memory and a processing unit on one direct panel. CONSTITUTION: A DRAM cell, N-MOSFET is constructed by formatting a source and gate electrode with adding impurities when the dielectric layer is formed a high work function material is used, and a conductive electrode layer is formed on the exposed surfaces of the device with including a drench well and then a high dielectric film, required the dielectric constant should be at least 20-30, is deposited over the conductive layer.
申请公布号 KR20000048287(A) 申请公布日期 2000.07.25
申请号 KR19990059749 申请日期 1999.12.21
申请人 LUCENT TECHNOLOGIES INC. 发明人 CHOI SEUNG MOO
分类号 H01L21/8242;(IPC1-7):H01L21/824 主分类号 H01L21/8242
代理机构 代理人
主权项
地址