| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and low-cost shape measuring device, having high light use efficiency and capable of accurately measuring a distance to an object, regardless of external conditions such as a change in the reflection coefficient of an object surface. SOLUTION: This device comprises a semiconductor laser 3, a plane sensor 9, a shutter 11C, and a distance calculation part 13. When an illumination light 4a emitted from the semiconductor laser 3 is intensity-modulated light, the plane sensor 9 detects synthesized light of both reflected light 4b from a target object 6 and reference light 4c to output a detection signal of the synthesized light. When the illumination light 4a emitted from the semiconductor laser 3 is a steady light not intensity-modulated, the shutter 11C is closed and the plane sensor 9 detects the reflected light 4b from the target object 6 to output a detection signal. The distance calculation part 13 corrects the detection signal of the synthesized light to eliminate the influence of a reflection coefficient of the object 6 from the detection signal of the combined light according to the detection signal in the case that the reflected light 4b is the steady light, then calculates a distance to the object 6 according to the corrected detection signal of the combined light.
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