| 摘要 |
PROBLEM TO BE SOLVED: To generate ions without forming spots, keep the thickness of a protection film covering a second electrode uniform, and thereby prevent its deterioration. SOLUTION: A second electrode 5, confronting a first electrode 3 with an insulator layer 4 between, has a plurality of parallel arranged divided electrodes 5a and a connection part 5b for connecting end parts of the divided electrodes 5a and is formed partly into a shape having a bend portion 5b bent substantially at right angles, and the internal angle of the bend portion 5d is made with a smooth curve. When an organic metallic compound is baked on a surface of the insulator layer 4 for forming a second electrode 5, the surface is kept flat by suppressing the occurrence of distortion at the interior angle of the bend portion 5d, ions are generated without forming spots, the thickness of a protective film covering the second electrode is kept uniform, and its deterioration is prevented. |
