Novel ester compounds, polymers, resist compositions and patterning process
摘要
<p>A novel ester compound having an exo-form 2-alkylbicycloÄ2.2.1Üheptan-2-yl group as the protective group is provided as well as a polymer comprising units of the ester compound. The polymer is used as a base resin to formulate a resist composition having a higher sensitivity, resolution and etching resistance than conventional resist compositions.</p>
申请公布号
EP1004568(A2)
申请公布日期
2000.05.31
申请号
EP19990308687
申请日期
1999.11.02
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
KINSHO, TAKESHI;NISHI, TSUNEHIRO;KURIHARA, HIDESHI;HASEGAWA, KOJI;WATANABE, TAKERU;WATANABE, OSAMU;NAKASHIMA, MUTSUO;TAKEDA, TAKANOBU;HATAKEYAMA, JUN