Inertia sensor and method of fabricating the same

摘要

A sensor device (1) has a sensing layer (A) and an auxiliary layer (B) for supporting the sensing layer, the two layers being superposed on each other in a laminar form. The sensing layer has a vibratory body (11, 13) displaceable in a direction parallel to a junction surface between the two layers. The auxiliary layer (B) is affixed to the sensing layer (A) and a recess or through-hole (10) of a larger area than that of the vibratory body is formed in the auxiliary layer at a part thereof confronting the vibratory body.