发明名称 SUBSTRATE CLEANER
摘要 PROBLEM TO BE SOLVED: To prevent generation of particles by easily and surely attaching a cleaning brush to a rotating part. SOLUTION: Three protrusions 37 are formed on the peripheral wall 32 of a brush pressing base 30, and an elastic piece 35 is formed close to the middle of the two protrusions 37 among the three. A guide 62 for leading the protrusion 37 to a detainer 63 when a cleaning brush 21 and a rotating part 25 are relatively rotated is formed on the peripheral face 61a of the main body 61 of the rotating part 25. Further, a depression 66 with which the engaging protrusion 36 at the tip of the elastic piece 35 is engaged when the brush 21 has been attached to the rotating part 25 is formed in the peripheral face 61a. The brush 21 is attached to the rotating part 25 by inserting the rotating part 25 in a recess 30a and rotating the brush 21 by an angle of about 60 deg. in the opposite direction to the rotating direction A.
申请公布号 JP2000126698(A) 申请公布日期 2000.05.09
申请号 JP19980304405 申请日期 1998.10.26
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SAWADA ATSUSHI
分类号 B08B1/04;B08B3/08;B08B11/00;H01L21/304;(IPC1-7):B08B1/04 主分类号 B08B1/04
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