发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device and a method for manufacturing the same that forms a self-aligned contact hole between two gate lines. A substrate is provided that has a first gate line formed thereon. An insulator is formed on the first gate line and substrate. Then a portion of the insulator and a portion of the first gate line is selectively removed to split the first gate line into a second gate line and a third gate line and to concurrently expose the substrate. Thus, producing a self-aligned contact hole between the second and third gate lines.
申请公布号 US6060346(A) 申请公布日期 2000.05.09
申请号 US19970931238 申请日期 1997.09.16
申请人 LG SEMICON CO., LTD. 发明人 ROH, JAE SUNG;YANG, WOUN S
分类号 H01L21/302;H01L21/28;H01L21/3065;H01L21/60;H01L21/768;H01L21/8234;H01L23/522;(IPC1-7):H01L21/823;H01L21/822;H01L21/335;H01L21/336 主分类号 H01L21/302
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