发明名称 |
Method and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy |
摘要 |
A system for determining one or more critical dimension(s) of a semiconductor structure comprising a scanning electron microscope and a parallel distributed process operationally connected to an output of a scanning electron microscope. Said parallel distributed process containing coefficients that provide a multi dimensional mapping space for the output of said scanning electron microscope to map to an output value that provides information on the dimensions of the semiconductor structure.
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申请公布号 |
US6054710(A) |
申请公布日期 |
2000.04.25 |
申请号 |
US19970993036 |
申请日期 |
1997.12.18 |
申请人 |
CYPRESS SEMICONDUCTOR CORP. |
发明人 |
BRUGGEMAN, ALBERT C. |
分类号 |
G01Q30/02;G01Q30/04;G03F7/20;(IPC1-7):G01N23/225 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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