| 摘要 |
PROBLEM TO BE SOLVED: To extremely accurately and simply manufacture an optical element matrix by forming a plurality of fine structure flat plates each having a shape corresponding to a projected shape of an optical element side of a desired design at ends of a flat plate having two surfaces parallel to one another in the step having an LIGA process. SOLUTION: A resist film 3, a mask support 2 and an X-ray mask film 1 are sequentially laminated on a metal base plate 4. As the film 1, a window frame-like member is used, and a window part 6 is formed in an air gap state. A fine structure 5 of a projected shape of an optical element side of a desired design is formed at at least part of its inner periphery. Here, the plate 4 is made of a metal for substantially completely cutting off an X-ray to be emitted, and a resist material used for the film 3 has excellent optical transmittance and can easily dissolve to remove a part exposed with the X-ray. A fine structure flat plate having the fine structure formed at its end is manufactured by an LIGA process, and a plurality of the plates are superposed on each other.
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