发明名称 X-RAY GENERATOR
摘要 PROBLEM TO BE SOLVED: To provide an X-ray generator capable of drastically reducing light widely ranging from infrared range, visible range to ultraviolet range and taking out without reducing X-ray as little as possible in wavelength used. SOLUTION: In an X-ray generator taking out and utilizing an X-ray radiated from a radiation light ring or an X-ray 111 radiated from plasma 106 by projecting pulse laser light 101 onto a target material 105 placed in a depressurized vacuum vessel 100 and turning the target material 105 to a plasma, an optical member 109 having a small opening or small opening group is placed so that the small opening or the small opening group is positioned in the light path (vacuum vessel 100) of used X-ray radiated from the radiation ring or the plasma so that the X-ray 111 used is taken out by the optical member 109.
申请公布号 JP2000098094(A) 申请公布日期 2000.04.07
申请号 JP19980266130 申请日期 1998.09.21
申请人 NIKON CORP 发明人 KONDO HIROYUKI;KOMATSUDA HIDEKI
分类号 H05G2/00;G21K3/00;(IPC1-7):G21K3/00 主分类号 H05G2/00
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