发明名称 |
Platform with displacement amplification mechanism for scanning-microscope has two parallel arms attached via elastic connecting sections to base |
摘要 |
The displacement amplification mechanism includes two parallel mechanical amplification arms (428,424) the first of which is attached to a fixed base (418), with an elastic section connected to both arms and the base. A second elastic connecting section (432) rotatably connects the second arm to the base. A connecting piece (436) connects the first arm to the second arm. An actuator (442) extends in the direction of the first arm, crosswise to the second arm. An Independent claim is included for a platform. |
申请公布号 |
DE19940124(A1) |
申请公布日期 |
2000.04.06 |
申请号 |
DE1999140124 |
申请日期 |
1999.08.30 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
UE, YOSHIHIRO |
分类号 |
G01Q30/20;G12B5/00;H01L41/09;(IPC1-7):G05D3/00;H01J37/20 |
主分类号 |
G01Q30/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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