Method and apparatus for polishing a hard disk substrate

摘要

Substrates to be used in manufacturing hard disks are polished in a two-step process entailing a coarse and fine polishing in a single polishing machine. The use of this method and apparatus eliminates the need for two separate polishing machines and for transferring the disks from one polishing machine to another. Furthermore, the overall quality of hard disk substrates polished by this method and apparatus, including smoothness, flatness and edge roll-off, is superior to that achieved by the prior art.